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PROCESS TECHNOLOGY & CAPABILITIES

PVD

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Thermal
Evaporation

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Effusion
Cells

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Electron Beam Evaporation

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Magnetron
Sputtering

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Ion Beam
Sputtering

CVD

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Plasma Enhanced Chemical Vapour Deposition

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Atomic Layer Deposition

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Microwave Plasma Chemical Vapour Deposition

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Reactive
Ion Etching

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