UHV SYSTEMS & COMPONENTS

Vacuum Techniques is a leader in vacuum equipment and components for academia, research, and industrial markets. With over 30 years of engineering experience and innovation, we continue to develop customer-specific solutions and products

-9

Material of Construction

Dimensions

Vacuum Chamber

Vacuum

Leak Rate

Sealing

Ports

Vacuum Pumping System

Thermal Shrouds

Temperature

Operating Pressure

View Port

Electrical Feedthroughs

Thermocouple Feedthroughs

RF Feedthroughs

Control Panel

SS 304L /SS 3 I 6L
Customizable as per user
Horizontal/Vertical
10-6 mbar
Less than 1x 10-8 mbar ltr/sec individual
Viton O ring
As per customer requirement
Roots Rotary, Turbo/cryo with dry/rotary
backing with reduancy
SS 304 Double embossed blister type
BOK to400K
10 bar (g) max
Quartz Crystal
50/78 pin electrical feedthroughs
T type 50 pin
N type SS/gold plated
19 inch

Design code ASME Sec VIII. Div - l/Bs5500/IS2825
Stress analysis of chamber using FEA software
Front and rear dished end motorized movement
Third part inspection
RGA for monitoring contamination level under high vacuum
QCM for monitoring contamination level under high vacuum
Black thermal painting on inner surface of the thermal shrouds
Electro polishing on outer surface
Thermal condition unit/Thermal circulator
Integrated heat exchanger
GN2 Blower
Data acquisition
PLC based automatic controller with IPC

Leaders in Vacuum Systems, Instruments and Components

UHV SYSTEMS & COMPONENTS

UHV SYSTEMS & COMPONENTS

-9

Vacuum Techniques
Private Limited

Contact Us